Description
Features & Benefits
- All fluoropolymer filter cartridges featuring a PTFE membrane with PFA structural components
- Available with 0.05, 0.1 and 0.2 micron membrane
- Manufactured, flushed and integrity tested in ISO Class 7 cleanroom
- Pre-wet option is available
- Performance Characteristics
- Exhibits rapid rinse-up to 18 MΩ-cm resistivity and single digit ppb levels of TOC
- Particle cleanliness: <10 particles / mL >0.1 µm
- Extractable levels: < 25 ppb total in 5% HCl
- 100% Integrity tested
Typical Applications
- Etchers
- Strippers
- Hot Acids
- Ozone
- Bulk Delivery
- Cleaners
- Photoresist